nanometrology (rus. нанометрология) — a subfield of metrology dealing with the development of theories, methods and tools for measuring different parameters of objects whole linear dimensions are in the nanoscale.


Nanometrology includes the theoretical and practical aspects of providing the unity of measurements in the field of nanotechnology, such as the following: reference standards of physical values and standard machines, standard comparison templates; standardised techniques of measuring the physical and chemical parameters and properties of nanotechnology objects, as well as techniques of calibrating the measurement instruments used in nanotechnologies; metrological monitoring of materials, structures, objects and other nanotechnology products' manufacturing processes.


  • Ivanov Victor V.