solid phase epitaxy
abbr., SPE
(rus. эпитаксия, твердофазная abbr., ТФЭ)
— a technique to overgrow an epitaxial film, where at first a non-ordered (amorphous) film is deposited at reduced temperatures, then it is crystallised at a higher temperature (which is still lower the flowing point of this material).
Authors
- Zotov Andrey V.
- Saranin Alexander A.
