solid phase epitaxy abbr., SPE (rus. эпитаксия, твердофазная abbr., ТФЭ) — a technique to overgrow an epitaxial film, where at first a non-ordered (amorphous) film is deposited at reduced temperatures, then it is crystallised at a higher temperature (which is still lower the flowing point of this material).



  • Zotov Andrey V.
  • Saranin Alexander A.