homoepitaxy abbr., homoepi (rus. гомоэпитаксия abbr., homoepi) — form of epitaxy, in which the growing layer and the substrate are made of the same material. They can differ only in content of the doping agent.


Homoepitaxy is used to grow layers with impurity content differing from that of the substrate, or to create layers with different doping levels.


  • Saranin Alexander A.

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