During counter-scanning it is possible to obtain one or two pairs of CSIs. Each pair consists of a direct image and the image counter to it. First, a conventional image, called the direct image, is obtained; after that a counter image is obtained by reversing the movement direction along a raster line and the movement direction from line to line of the raster. The direct image of the second pair is formed by the retrace lines of the direct image of the first pair. The counter image of the second pair is formed by the retrace lines of the counter image of the first pair. CSIs are intended to correct distortions caused by drift of the scanning microscope probe relative to the surface under investigation. To implement correction, it is sufficient to have at least one common feature between the direct and the counter images. As compared to a single CSI pair, the use of two pairs requires twice as much memory and processing time, but on the other hand it enables one to increase precision of correction and reduce the noise level in the corrected image.