scanning, feature-oriented abbr., FOS (rus. сканирование, особенность-ориентированное abbr., ООС otherwise сканирование, объектно-ориентированное) — a method of precision measurement of surface topography with a scanning probe microscope in which surface features (objects) are used as reference points for microscope probe attachment.

Description

With the FOS method, by passing from one surface feature to another located nearby, the relative distance between the features and the feature neighborhood topographies are measured. This approach allows one to scan an intended area of a surface by parts and then reconstruct the whole image from the obtained fragments.

Any topography element that looks like a hill or a pit in wide sense may be taken as a surface feature. Examples of surface features (objects) are: atoms, interstices, molecules, grains, nanoparticles, clusters, crystallites, quantum dots, nanoislets, pillars, pores, short nanowires, short nanorods, short nanotubes, viruses, bacteria, organelles, cells, etc.

FOS is designed for high-precision measurement of surface topography as well as other surface properties and characteristics. Moreover, in comparison with conventional scanning, FOS makes it possible to obtain a higher spatial resolution. Thanks to a number of techniques embedded in FOS, the distortions caused by thermal drifts and creeps are practically eliminated.

FOS has the following fields of application: surface metrology, precise probe positioning, automatic surface characterisation, automatic surface modification/stimulation, automatic manipulation of nano-objects, nanotechnological processes of "bottom-up" assembly, coordinated control of analytical and technological probes in multiprobe instruments, control of atomic/molecular assemblers, control of probe nanolithographs, etc.

Illustrations

<p></p><p class="MsoNormal"><span lang="EN-US" style="mso-ansi-language:EN-US">Image of carbon film

Image of carbon film surface obtained by FOS method (AFM, tapping mode). Carbon clusters (hills) and intercluster spaces (pits) are used as surface features.


Author

  • Rostislav V. Lapshin

Sources

  1. R. V. Lapshin, Feature-oriented scanning methodology for probe microscopy and nanotechnology, Nanotechnology, volume 15, issue 9, pages 1135-1151, 2004.
  2. R. Lapshin, Feature-oriented scanning probe microscopy: precision measurements, nanometrology, bottom-up nanotechnologies, Electronics: Science, Technology, Business, Special issue “50 years of the Institute of Physical Problems”, no. 9, pp. 94-106, 2014 (in Russian).