scanning electron microscopy
abbr., SEM
(rus. микроскопия, электронная сканирующая otherwise микроскопия, растровая электронная abbr., СЭМ; РЭМ)
— an electron microscopy technique for imaging the topography of a surface (when recording secondary electrons) and/or surface element distribution pattern (when recording back-scattered electrons, Auger electrons and X-rays) by scanning the surface with a focused electron beam. See also scanning electron microscope.
Authors
- Zotov Andrey V.
- Saranin Alexander A.
Source
- Oura K. et al. Surface Science: An Introduction // Springer, 2010 - 452 pp.
