scanning electron microscopy
abbr.,
SEM
(rus. микроскопия, электронная сканирующая abbr., СЭМ; РЭМ otherwise микроскопия, растровая электронная)
—
an electron microscopy technique for imaging the topography of a surface (when recording secondary electrons) and/or surface element distribution pattern (when recording back-scattered electrons, Auger electrons and X-rays) by scanning the surface with a focused electron beam. See also scanning electron microscope.
Description
Authors
- Andrey V. Zotov
- Alexander A. Saranin
Source
- Oura K. et al. Surface Science: An Introduction // Springer, 2010 - 452 pp.