scanning electron microscopy abbr., SEM (rus. микроскопия, электронная сканирующая otherwise микроскопия, растровая электронная abbr., СЭМ; РЭМ) — an electron microscopy technique for imaging the topography of a surface (when recording secondary electrons) and/or surface element distribution pattern (when recording back-scattered electrons, Auger electrons and X-rays) by scanning the surface with a focused electron beam. See also scanning electron microscope.


  • Zotov Andrey V.
  • Saranin Alexander A.


  1. Oura K. et al. Surface Science: An Introduction // Springer, 2010 - 452 pp.

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