scanning electron microscopy abbr., SEM (rus. микроскопия, электронная сканирующая abbr., СЭМ; РЭМ otherwise микроскопия, растровая электронная) — an electron microscopy technique for imaging the topography of a surface (when recording secondary electrons) and/or surface element distribution pattern (when recording back-scattered electrons, Auger electrons and X-rays) by scanning the surface with a focused electron beam. See also scanning electron microscope.

Description


Authors

  • Andrey V. Zotov
  • Alexander A. Saranin

Source

  1. Oura K. et al. Surface Science: An Introduction // Springer, 2010 - 452 pp.