nanoelectromechanical systems abbr., NEMS (rus. наноэлектромеханические системы abbr., НЭМС) — devices made up of electronic and mechanical components sized smaller than 100 nm.


Nanoelectromechanical systems are a smaller scale of microelectromechanical systems (MEMS).

NEMS are used as high-frequency oscillators (up to 10 GHz), nanomotors and modulators.

They are produced mostly from graphene and carbon nanotubes.

Today, nanoelectromechanical systems are produced using both “top-down” manufacturing technologies, such as conventional microelectronics techniques (optical and electron beam lithography) and “bottom-up” technologies, such as molecular recognition and self-assembly.


  • Shlyakhtin Oleg A.
  • Naymushina Daria A.
  • Bratishev Alexey V.


  1. (reference date 27.06.2010).
  2. Institute for Molecular Manufacturing. — (reference date 27.06.2010).

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